BioPharm Engineered Systems Joins CPS Group

NEHP’s patented gas floor modules have been installed in the largest Semiconductor foundry in North America

Drop in floor modules provide:

  • HPM gas point of isolation
  • Up to 9 gas sticks per module
  • SEMI S2/S6 compliant
  • NFPA 70 compliant
  • ANSI CGA codecompliant
  • FM 4910 code compliant
  • Handles all HPM gases
  • Dedicated N2 purge rail per stick
  • Pyrophoric gases UV/IR detection
  • Sprinkler coverage

Imagine what they can do for your process system needs.

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