NEHP’s patented gas floor modules have been installed in the largest Semiconductor foundry in North America
Drop in floor modules provide:
- HPM gas point of isolation
- Up to 9 gas sticks per module
- SEMI S2/S6 compliant
- NFPA 70 compliant
- ANSI CGA codecompliant
- FM 4910 code compliant
- Handles all HPM gases
- Dedicated N2 purge rail per stick
- Pyrophoric gases UV/IR detection
- Sprinkler coverage
Imagine what they can do for your process system needs.
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Critical Process Systems Group is a conglomerate of cutting edge...